Micro thermal conductivity detector with flow compensation using a dual MEMS device
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- 作者：G. de Graaf ; ger.degraaf@tudelft.nl" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; A. Abarca ProuzaAuthor Vitae ; M. GhaderiAuthor Vitae ; R.F. WolffenbuttelAuthor Vitae
- 关键词：Thermal conductivity detector ; Flow compensation ; Hydrogen sensor ; Helium sensor ; CO2 sensor ; MEMS ; TCD
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：1 October 2016
- 年：2016
- 卷：249
- 期：Complete
- 页码：186-198
- 全文大小：6692 K
文摘
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Generic method to reduce the in-line flow dependence of thermal gas sensors is presented.
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A high speed and high sensitivity MEMS TCD is presented.
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Effect of flow on the response of the sensor can be reduced by a factor 4–15.