A MEMS Flow Compensated Thermal Conductivity Detector for Gas Sensing

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• 作者：G. de Graaf ; A. Abarca ; ^{a.n.abarcaprouza@student.tudelft.nl" class="auth_mail" title="E-mail the corresponding author} ; M. Ghaderi ; R.F. Wolffenbuttel
• 关键词：Thermal conductivity detector ; flow compensation ; MEMS gas sensor.
• 刊名：Procedia Engineering
• 出版年：2015
• 出版时间：2015
• 年：2015
• 卷：120
• 期：Complete
• 页码：1265-1268
• 全文大小：480 K

文摘

A novel dual-Thermal conductivity detector (TCD) is presented for in-line flow compensation. TCDs generally demonstrate a flow dependence requiring calibration at a fixed flow rate. This dual-TCD is composed of two thin-film sensors on membranes in parallel on the same chip that are differentially operated. Both are laterally identical, but with a difference in quasi-static thermal conductivity by a different sample chamber. A reduced flow rate dependence is possible under conditions described in this work. Simulations of the dual-TCD that verify its operation are presented. The device is fabricated using both bulk and surface micromachining. Currently, prototypes are being fabricated and measurements results are forthcoming.