Thermal effect on the dynamic error of a high-precision worktable

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• 作者：Haitian Zou^a ; Baolin Wang^a ; ^b ; ^{b.wang@westernsydney.edu.au}
• 关键词：Worktable ; Dynamic behavior ; Yawing error ; Thermo-mechanical effect
• 刊名：Archives of Civil and Mechanical Engineering
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：17
• 期：2
• 页码：336-343
• 全文大小：2320 K
• 卷排序：17

文摘

This paper investigates the thermal effect on the dynamic error of a high-precision machine worktable during operation. The thermo-mechanical model was established to obtain the motion errors of the worktable by considering the combined effects of varying internal heat sources and external thermal drifts. The temperature tests were performed to obtain the initial conditions of the model and provide a verification for the analytical convection coefficients and heat flux, which were obtained by inverse analysis. The predicted yawing errors of the worktable were confirmed by interferometer tests. Numerical and experimental results suggest that the environmental temperature fluctuation is the largest contributor to the motion errors of the worktable, and they increase with the increasing of environmental temperature. This study allows deeper insights into the underlying mechanisms that result in the motion accuracy variations of the worktable due to the thermal effects, which can provide a strategy for manufacture to further compensate the thermal error and realize ultra precision.