Fabrication of cerium-doped yttrium aluminum garnet thin films by a mist CVD method
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- 作者：Shunsuke Murai ; murai@dipole7.kuic.kyoto-u.ac.jp" class="auth_mail" title="E-mail the corresponding author ; Takafumi Sato ; Situ Yao ; Ryosuke Kamakura ; Koji Fujita ; Katsuhisa Tanaka
- 关键词：Mist CVD method ; Thin films ; Cerium-doped yttrium aluminum garnet
- 刊名：Journal of Luminescence
- 出版年：2016
- 出版时间：February 2016
- 年：2016
- 卷：170
- 期：part_P3
- 页码：808-811
- 全文大小：1156 K
文摘
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We have synthesized thin films of yttrium aluminum garnet doped with Ce3+ (YAG:Ce) by using a mist chemical vapor deposition (CVD) method for the first time.
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The thickness of the single-phase and stoichiometric thin film obtained by 2 h deposition and following heat treatments is 2 μm.
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The thin film is porous but optically transparent, and shows yellow fluorescence upon irradiation with a blue light.
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Mist-CVD is a green and sustainable technique that allows fabrication of high-quality thin films at atmospheric conditions without vacuum equipment.