Dynamic modelling and experimental study of asymmetric optothermal microactuator
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- 作者：Shuying Wang ; Qin Chun ; Qingyang You ; Yingda Wang ; Haijun Zhang ; zhanghj@zju.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Optothermal microactuator ; Dynamic modelling ; Deflection
- 刊名：Optics Communications
- 出版年：2017
- 出版时间：15 January 2017
- 年：2017
- 卷：383
- 期：Complete
- 页码：566-570
- 全文大小：577 K
文摘
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Dynamic modelling and experimental study of a new type of asymmetric optothermal microactuator (OTMA) is reported.
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Experiments show that OTMA’s maximum deflection and deflection amplitude decrease as frequency increases, consisting with the theoretical model.
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The OTMA can generate 8.2 μm maximum deflection and 4.2 μm deflection amplitude under 17 Hz/2 mW laser pulse irradiation.