Analysis and design of a novel piezoresistive accelerometer with axially stressed self-supporting sensing beams
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- 作者：Yu Xu cactusxy@stu.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Libo Zhao ; libozhao@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Zhuangde Jiang zdjiang@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Jianjun Ding dingjianjun@126.com" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Tingzhong Xu tingzhongxu@163.com" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Yulong Zhao zhaoyulong@mail.xjtu.edu.cn" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae
- 关键词：Accelerometer ; Axially stressed self-supporting sensing beams ; Sensitivity ; Resonant frequency ; Cross-axis sensitivity ; Comprehensive figure of merit
- 刊名：Sensors and Actuators A: Physical
- 出版年：2016
- 出版时间：15 August 2016
- 年：2016
- 卷：247
- 期：Complete
- 页码：1-11
- 全文大小：3416 K
文摘
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A novel piezoresistive accelerometer structure with axially stressed self-supporting sensing beams was presented in this paper.
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Based on the Euler-Bernoulli beam theory, we derived theoretical model for the location of the sensing beams, stresses and resonant frequency.
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The finite element method simulations were carried out to verify our model, including the condition of achieving the purely axial stress, cross-axis sensitivity and other performances.
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The accelerometer was fabricated on a silicon-on-insulator wafer and characterized by the static and dynamic experiments.
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Compared with other accelerometers in the literatures, the developed accelerometer exhibited an excellent performance concerning a comprehensive figure of merit.