CdS semiconductor thin films were deposited on glass substrates by rf-assisted magnetron sputtering by varying the sputtering time.

XRD studies showed that CdS thin films are polycrystalline, preferentially oriented along (002) direction and with both crystallite size and mean-square strain decreasing while increasing the sputtering time.

Using AFM and Cross-Section SEM techniques the surface morphology parameters were computed for CdS thin films of different thicknesses.

A combined study of optical properties for CdS sputtered films using spectroscopic ellipsometry and optical spectrophotometry was carried out.