Experimental comparison of disturbance observer and inverse-based hysteresis compensation in 3D nanopositioning piezoactuation
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- 作者：Łukasz Rybaa ; lukasz.ryba@gipsa-lab.grenoble-inp.fr" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Alina Vodaa ; alina.voda@gipsa-lab.grenoble-inp.fr" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae ; Gildas Besanç ; ona ; b ; gildas.besancon@gipsa-lab.grenoble-inp.fr" class="auth_mail" title="E-mail the corresponding authorAuthor Vitae
- 关键词：Piezoelectric actuator ; Hysteresis ; Modified Prandtl-Ishlinskii model ; Disturbance observer ; Micro/nano-positioning ; Tunneling current
- 刊名：Sensors and Actuators A: Physical
- 出版年：2015
- 出版时间：1 December 2015
- 年：2015
- 卷：236
- 期：Complete
- 页码：190-205
- 全文大小：6540 K
文摘
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Three methods for hysteresis compensation of piezoelectric actuator compared experimentally.
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The effect of hysteresis on surface reconstruction using tunneling current studied in 3D.
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The open loop MPI model improves the performance of closed loop DOB (and vice versa).
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An RS pole placement controller used for tunneling current control.