Experimental investigation of temperature and relative humidity effects on resonance frequency and quality factor of CMOS-MEMS paddle resonator
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- 作者：Mohammad Tariq Jana ; b ; tariqjan@kust.edu.pk" class="auth_mail" title="E-mail the corresponding author ; Farooq Ahmada ; c ; ahmad123farooq@gmail.com" class="auth_mail" title="E-mail the corresponding author ; Nor Hisham B. Hamida ; Mohd Haris B. Md Khira ; Muhammad Shoaiba ; Khalid Ashrafa
- 关键词：CMOS-MEMS ; Resonator ; Environmental chamber ; Resonance frequency ; Quality factor
- 刊名：Microelectronics Reliability
- 出版年：2016
- 出版时间：August 2016
- 年：2016
- 卷：63
- 期：Complete
- 页码：82-89
- 全文大小：1322 K
文摘
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Performance of a CMOS-MEMS paddle resonator is investigated.
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Effects of temperature variation on the resonance frequency are analysed.
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Variation in quality factor is studied under the effects of varying temperature.
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Resonance frequency is analysed under the variation of relative humidity.