Effects of BEOL on self-heating and thermal coupling in SiGe multi-finger HBTs under real operating condition
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Effects of back-end-of-line on the self-heating and thermal coupling are estimated.

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A method to estimate the coupling under a real operating condition is proposed.

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Coupling factors are found to slightly increase with dissipated power.

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A closed-form formulation is proposed for the coupling factors in a multi-finger HBT.

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