Gallium ion irradiation induced compaction and hardening of sputter deposited amorphous carbon thin films
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- 作者：Fritz Lehnerta ; fritz.lehnert@iom-leipzig.de" class="auth_mail" title="E-mail the corresponding author ; Tilmann Hä ; uplb ; Bernd Abela ; b ; S.G. Mayra ; c ; stefan.mayr@iom-leipzig.de" class="auth_mail" title="E-mail the corresponding author
- 关键词：Ion irradiation ; Amorphous carbon ; Compaction ; Hardening
- 刊名：Materials & Design
- 出版年：2016
- 出版时间：15 December 2016
- 年：2016
- 卷：112
- 期：Complete
- 页码：512-518
- 全文大小：1187 K
文摘
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We examine behavior of amorphous carbon under 30 keV gallium ion irradiation.
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A surface depression and material compaction upon irradiation was observed.
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A material stiffening was observed and correlated to surface morphology measurements.
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The changed material properties were traced to altered bonding configuration by Raman spectroscopy measurements.
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Physical understanding is based on a detailed discussion of material stresses.