Rf-sputtering deposition of nano-crystalline zirconia thin films with high transparency

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• 作者：Koksal Yildiz ; ^{kyildiz@firat.edu.tr} ; Unal Akgul ; Burhan Coskun ; Yusuf Atici
• 关键词：Zirconia ; Thin films ; Sputtering ; Microstructure ; Optical properties
• 刊名：Materials Letters
• 出版年：2013
• 出版时间：1 March, 2013
• 年：2013
• 卷：94
• 期：Complete
• 页码：161-164
• 全文大小：578 K

文摘

Zirconia thin film was deposited on a microscope slide substrate by rf-sputtering. The surface morphology and elemental composition of the film were characterized by SEM and EDX. SEM images showed that the surface morphology of the film consists of spherical-like grains, grain agglomerates and micro voids. EDX experiments showed that the film is composed of 32.82 at % Zr and 67.18 at % O. The microstructure of the film was also investigated by TEM. It was found that the film has poly crystalline grains with nano-sized and different orientations. A study of lattice image for the film was done by HRTEM. The d_hkl values were evaluated. Defects and lattice distortions were seen. The optical properties of the film showed that its average optical transmittance in the visible region is high (¡«84 % ) and the values of E_g and E_u are ¡«4.05 eV and ¡«0.446 eV, respectively.