Large bandwidth and thermal compensated piezoelectric thick-film acceleration transducer

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• 作者：Crescini ; D. ; Marioli ; D. ; Sardini ; E. ; Taroni ; A.
• 关键词：Accelerometer ; Piezoelectric ; Thick film ; Thermal compensation
• 刊名：Sensors and Actuators A: Physical
• 出版年：2001
• 出版时间：January 5, 2001
• 年：2001
• 卷：87
• 期：3
• 页码：131-138
• 全文大小：420 K

文摘

A thick film piezoelectric accelerometer consisting of two sensitive PZT ferroelectric layers 40–50μm thick each, is described in the paper. It works without the aid of an inertial mass. The two layers are properly connected and make the accelerometer almost independent of the thermal changes. The processing electronics is a specific low-noise, large bandwidth charge amplifier: its low-frequency cut-off can be set much lower than in a classical charge amplifier. Experimental tests demonstrate a resolution of 0.025 % F.S., a bandwidth ranging from 0.7Hz to 40kHz and a sensitivity of 6mVs²/m. The thermal compensation technique used, the low noise charge amplifier, the experimental results are reported in the paper.