Control of heat transfer in continuous-feeding Czochralski-silicon crystal growth with a water-cooled jacket

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• 作者：Wenhan Zhao ; Lijun Liu ; ^{ljliu@mail.xjtu.edu.cn}
• 关键词：A1. Computer simulation ; A2. Continuous-feeding Czochralski method ; A1. Heat transfer enhancement ; B2. Semiconducting silicon ; A1. Stresses
• 刊名：Journal of Crystal Growth
• 出版年：2017
• 出版时间：15 January 2017
• 年：2017
• 卷：458
• 期：Complete
• 页码：31-36
• 全文大小：1177 K
• 卷排序：458

文摘

Heat transfer enhancement in continuous CZ-Si crystal growth is investigated. The impact of water-cooled jacket on heat transfer in crystal is investigated. An improved design of the heat shields was proposed to control heat transfer. The crystal growth rate can be increased by 20% with the proposed technique.