Comments on “GaN/Si based single SAW resonator temperature sensor operating in the GHz frequency range”

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• 作者：Waldemar Soluch ^{waldemar.soluch@itme.edu.pl" class="auth_mail" title="E-mail the corresponding author}
• 关键词：Surface acoustic wave ; Bulk acoustic wave ; GaN epitaxial layer ; Interdigital transducer ; Delay line
• 刊名：Sensors and Actuators A: Physical
• 出版年：2016
• 出版时间：1 February 2016
• 年：2016
• 卷：238
• 期：Complete
• 页码：297-298
• 全文大小：275 K

文摘

Measurement methods and results presented in the title paper were critically analyzed. It was shown that for two-port device, the measured transmission losses are caused not by Rayleigh type surface acoustic wave (SAW) but are the result of interference of the bulk acoustic wave (BAW), generated and detected by interdigital transducers (IDT), and the electrical feedthrough at frequencies higher than that of SAW. Therefore, the measured reflection losses of one-port device, are the results of BAW radiation by the IDT. No resonances exist in both type of devices.