Theoretical study of precision and accuracy of strain analysis by nano-beam electron diffraction
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- 作者：Christoph Mahr ; mahr@ifp.uni-bremen.de" class="auth_mail" title="E-mail the corresponding author ; Knut Mü ; ller-Caspary ; Tim Grieb ; Marco Schowalter ; Thorsten Mehrtens ; Florian F. Krause ; Dennis Zillmann ; Andreas Rosenauer
- 关键词：Strain measurement ; Electron diffraction ; Precession ; Precision ; Accuracy ; TEM ; STEM ; NBED
- 刊名：Ultramicroscopy
- 出版年：2015
- 出版时间：November 2015
- 年：2015
- 卷：158
- 期：Complete
- 页码：38-48
- 全文大小：3452 K
文摘
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Theoretical study of precision and accuracy of strain analysis by nano-beam electron diffraction.
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Evaluation of simulations for exact knowledge of the actual strain.
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Improvement of precision using electron beam precession.
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Explanation of artefacts in the measurement close to interfaces.
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Theoretical solution for the improvement of the accuracy at interfaces.