Effects of catalyst configurations and process conditions on the formation of catalyst nanoparticles and growth of single-walled carbon nanotubes

详细信息    查看全文

• 作者：Saeed Motaragheb Jafarpour^a ; ^{saeed.jafarpour@zfm.tu-chemnitz.de} ; Mandar Kini^a ; Stefan E. Schulz^a ; ^b ; ^c ; Sascha Hermann^a ; ^b ; ^c
• 关键词：Catalytic chemical vapour deposition (CCVD) ; Catalyst nanoparticle ; Single-walled carbon nanotubes ; Raman spectroscopy
• 刊名：Microelectronic Engineering
• 出版年：2017
• 出版时间：5 January 2017
• 年：2017
• 卷：167
• 期：Complete
• 页码：95-104
• 全文大小：2940 K
• 卷排序：167

文摘

Using Al2O3 support layer with certain morphology and annealing under H2, catalyst NP with small size and narrow size distribution can be formed. Differentiated study on the effect of different bilayer Co‐Mo catalyst configuration on the properties of grown SWCNTs. Lowering catalyst deposition rate is a straightforward approach to fabricate catalyst layer with low surface roughness and small NP size. Bilayer Co‐Mo:0.5‐0.1 nm prepared by low catalyst deposition rate shows a high potential for future applications.