文摘
Atmospheric-pressure plasma-deposition can produce highly permselective silica membranes. The membranes grown with N2/Ar plasma displays a molecular sieving property. The permeance ratios for He/N2 and He/SF6 are 196 and 820, respectively. The thermally-annealed membrane exhibits remarkable permselectivity for CO2. The permeance ratios for CO2/N2 and CO2/CH4 are 46 and 166, respectively.