Film forming properties of silicon nanoparticles on Si_xN_y coated substrates during excimer laser annealing

详细信息    查看全文

• 作者：M. Caninenberg ; D. Kiesler ; N. Benson ; R. Schmechel
• 刊名：Optics & Laser Technology
• 出版年：2017
• 出版时间：1 May 2017
• 年：2017
• 卷：90
• 期：Complete
• 页码：33-39
• 全文大小：1675 K
• 卷排序：90

文摘

Dewetting of Silicon Nanoparticles during excimer Laser annealing on glass substrates. Developing a Comsol Multiphysics model to investigate the dewetting effect. Contact angle and porosity of the layer mainly influencing the dewetting. Based on the simulation we predict process parameters which prevent the dewetting.