The thin DLC film was successfully deposited on Ni substrate by the CPE process. The SERS enhanced Raman revealed D and G bands and an additional band in 2150 cm− 1 The appearance of carbyne band (2150 cm− 1) by SERS is due to its low concentration. High laser power Raman showed D and G bands and two bands in 1130 and 1430 cm− 1. The presence of thin DLC film containing sp, sp2 and sp3 carbon bonding was proved.