Growth dynamics of nanocrystalline diamond films produced by microwave plasma enhanced chemical vapor deposition in methane/hydrogen/air mixture: Scaling analysis of surface morphology
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- 作者：V. Podgurskya ; vitali.podgurski@ttu.ee" class="auth_mail" title="E-mail the corresponding author ; A. Bogatova ; V. Sedovb ; c ; I. Sildosd ; A. Meree ; M. Viljusf ; J.G. Buijnstersg ; V. Ralchenkob ; c
- 关键词：Nanocrystalline diamond films ; Scaling ; Growth dynamics ; Roughness ; Atomic force microscopy
- 刊名：Diamond & Related Materials
- 出版年：2015
- 出版时间：September 2015
- 年：2015
- 卷：58
- 期：Complete
- 页码：172-179
- 全文大小：1852 K
文摘
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Nanocrystalline diamond films were produced by MPCVD.
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The mountain-like morphological patterns can be related to KPZ growth regime.
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The cusp-like morphological patterns are caused by non-local effects and noise.