Fabrication of large-aperture and high efficiency Fresnel diffractive membrane optic using a self-aligned method

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• 作者：Jian Zhang^a ; Mengjuan Li^b ; Ganghua Yin^b ; Jianchao Jiao^b ; Zhengkun Liu^a ; ^{zhkliu@ustc.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Xiangdong Xu^a ; Shaojun Fu^a
• 关键词：Self-alignment ; Diffractive membrane optics ; Diffraction efficiency
• 刊名：Optik - International Journal for Light and Electron Optics
• 出版年：2016
• 出版时间：October 2016
• 年：2016
• 卷：127
• 期：20
• 页码：9833-9839
• 全文大小：1564 K

文摘

To reduce the alignment difficulty and achieve high diffraction efficiency, a self-aligned method for fabricating large-aperture multi-level Fresnel membrane optic is proposed. Using this method, the rigorous alignment is avoided during fabrication process and high diffraction efficiency is achieved. A 4-level Fresnel diffractive polyimide membrane optic in 200 mm diameter and 20 μm thickness was manufactured by this method, which exhibits about 63% diffraction efficiency into the +1 order. The thickness variation of the membrane has a RMS of 30 nm.