A dither signal imposition to enhance an image in a scanning electron microscope

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• 作者：Kwang Oh Jung^a ; Dong Hwan Kim^b ; ^{dhkim@snut.ac.kr"" rel=""nofollow}
• 关键词：Scanning electron microscope ; Dithering ; Noise reduction ; Image improvement
• 刊名：Microelectronic Engineering
• 出版年：2011
• 出版时间：August 2011
• 年：2011
• 卷：88
• 期：8
• 页码：2601-2603
• 全文大小：552 K

文摘

In obtaining an image in a scanning microscope many kinds of noise are involved. This noise has a large influence on the image of the sample. In this research, we propose a method for improving image quality by applying dither signal injection. This method involves minimizing the noise that occurs in scan control circuits, which injects both noise and electron beams emitted in the course of A/D (analog to digital). The collected secondary electrons are multiplied through a photo multiplier tube (PMP) and then are converted to digital through an A/D converter. At this point, distortion occurs during the A/D process, which appears as white noise. We propose to minimize this white noise by using dither.