Defect levels into the band gap of Indium (In) doped TiO2 are investigated. Enhanced Raman phase related to In-O is observed in the Ti-O-In alloy. The low In-doped TiO2 has lower leakage current compared to the highly doped device. DLTS shows the increase of Indium (In) doping reduces the traps concentration. Activation energy increases with In doping into TiO2 as observed from PL emission.