The adhesion behavior of carbon coating studied by re-indentation during in situ TEM nanoindentation
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- 作者：Xue Fan ; Dongfeng Diao ; dfdiao@szu.edu.cn" class="auth_mail" title="E-mail the corresponding author
- 关键词：Adhesion ; Re-indentation ; Carbon coating ; In-situ nanoindentation ; Transmission electron microscope
- 刊名：Applied Surface Science
- 出版年：2016
- 出版时间：30 January 2016
- 年：2016
- 卷：362
- 期：Complete
- 页码：49-55
- 全文大小：3207 K
文摘
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In situ TEM nanoindentation was performed on carbon coating.
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Adhesion induced nano-response of re-indentation was directly observed.
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Adhesive forces were measured from the load–displacement curves.
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Adhesion energies released for re-indentation were quantitatively analyzed.
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Carbon coating reduced the impact of adhesion for silicon substrate.