Dielectric properties of BaTi₂O₅ thick films prepared on Pt-coated MgO(110) single-crystal substrate by laser chemical vapor deposition

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• 作者：Dongyun Guo^a ; ; Yang Ju^a ; Akihiko Ito^b ; Takashi Goto^b ; Chuanbin Wang^c ; Qiang Shen^c ; Rong Tu^c ; Zhixiong Huang^c ; Lianmeng Zhang^c
• 关键词：BaTi2O5 thick films ; Laser CVD ; Laser power ; Orientation ; Morphology
• 刊名：Ceramics International
• 出版年：2016
• 出版时间：July 2016
• 年：2016
• 卷：42
• 期：9
• 页码：11464-11467
• 全文大小：1560 K

文摘

BaTi₂O₅ (BT₂) films were deposited on Pt-coated MgO(110) single-crystal substrates by laser chemical vapor deposition. The single-phase BT₂ thick films were deposited at high deposition rates. The BT₂ thick films consisted of elongated grains with columnar cross-section. With increasing the deposition temperature (T_dep), the orientation of BT₂ thick films changed from (112) to (511), and the grain size increased. The (112)-oriented BT₂ thick film deposited at T_dep=956 K had dielectric constant (ε′) of 67 and dielectric loss (tanδ) of 0.015, while the (511)-oriented BT₂ thick film deposited at T_dep=964 K had ε′ of 74 and tanδ of 0.019 at 300 K and 1 MHz.