Effect of oxygen partial pressure and annealing on nanocrystalline p-type ZnO:Sb thin films
详细信息    查看全文
文摘
We have investigated the effect of oxygen partial pressure and annealing on nanocrystalline p-type Sb-doped ZnO thin films, grown by pulsed laser deposition, with hole concentration of 6.5?¡Á?1018/cm3 and mobility of 53?cm2/V-s. Uses of higher working pressure or annealing are found to reduce carrier concentration. A strong correlation is observed between carrier concentration and the violet (3.02?eV) emission related to free Zn-vacancy; stronger the violet emission, smaller the carrier concentration. In?contrast to earlier suggestion of using higher oxygen pressure for obtaining p-type conductivity, the present results show a deterioration of the quality of film.

© 2004-2018 中国地质图书馆版权所有 京ICP备05064691号 京公网安备11010802017129号

地址:北京市海淀区学院路29号 邮编:100083

电话:办公室:(+86 10)66554848;文献借阅、咨询服务、科技查新:66554700