Full range optical and electrical properties of Zn-doped SnO₂ and oxide/metal/oxide multilayer thin films deposited on flexible PET substrate

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• 作者：Yoonho Cho^a ; ^b ; Narendra S. Parmar^a ; Sahn Nahm^b ; Ji-Won Choi^a ; ^c ; ^{jwchoi@kist.re.kr}
• 关键词：CCS ; TCO ; OMO multilayer ; SnO2 ; Doping ; Optical and electrical properties
• 刊名：Journal of Alloys and Compounds
• 出版年：2017
• 出版时间：15 February 2017
• 年：2017
• 卷：694
• 期：Complete
• 页码：217-222
• 全文大小：1984 K
• 卷排序：694

文摘

Zn-doped SnO2 thin film deposition by Continuous Composition Spread RF sputtering. Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer were deposited on glass and PET substrates. OMO multilayer has ρ ∼5.33 × 10−5 Ω cm and the optical T > 85% in 550 nm region.