Effect of substrate temperature on structural, morphological, optical and electrical properties of IGZO thin films
文摘
IGZO thin films were deposited by ultrasonic spray pyrolysis. Films were grown at different substrate temperatures (425, 450 and 475 °C). Structural, morphological, optical and electrical properties were studied. Films showed transmittance >70% and minimum resistivity ~10.5×10−3 Ω cm.