Fabrication of 3D Microelectrodes by Combining Wire Electrochemical Micromachining and Micro-electric Resistance Slip Welding

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• 作者：Jianguo Lei ; Xiaoyu Wu ; ^{wuxy@szu.edu.cn" class="auth_mail" title="E-mail the corresponding author} ; Bo Wu ; Bin Xu ; Dengji Guo ; Jinming Zhong
• 关键词：3D microelectrode ; Wire electrochemical micromachining ; Micro-electric resistance slip welding ; Travelling wire ; Micro-vibration
• 刊名：Procedia CIRP
• 出版年：2016
• 出版时间：2016
• 年：2016
• 卷：42
• 期：Complete
• 页码：825-830
• 全文大小：358 K

文摘

Micromachining, using microelectrodes, is a key technology for manufacturing three-dimensional (3D) microstructures. However, 3D microelectrodes are difficult to fabricate, 3D microstructures are fabricated mainly using simple-shaped tools microelectrode with a layer by layer scanning strategy. Based on micro double-staged laminated object manufacture (micro-DLOM), 3D microelectrodes can be obtained by combining closed loop middle-speed wire (Ø100∼180 μm) electrical discharge machining (WEDM) and thermal diffusion welding. But it is difficult to obtain 3D microelectrodes with an edge length of end face less than 100 μm, though by low speed wire electrical discharge machining (LS-WEDM) or femtosecond laser cutting, the dimension of 3D microelectrodes can be further miniaturized, they are both very expensive. To solve the problem above, this paper proposed a low-cost method combining wire (Ø8 μm) electrochemical micromachining (WECMM) and micro-electric resistance slip welding to fabricate 3D microelectrodes. Firstly, with WECMM combining low frequency micro-vibration and travelling of wire electrode, 30-μm-thick 0Cr18Ni9 stainless steel foils were cut to obtain multi-layer two-dimensional (2D) microstructures. Secondly, through micro-electric resistance slip welding, the multi-layer 2D microstructures were laminated and bonded to fit 3D microelectrodes. Moreover, this paper investigated the influences of applied voltage, feed speed, wire electrode travelling and micro-vibration on machining surface quality and dimensional accuracy. Based on the studies above, two typical 3D microelectrodes with a dimension less than 100 μm were successfully fabricated. Finally, applying the fabricated 3D microelectrodes to micro-electrochemical machining (micro-ECM), 3D micro-cavities were obtained.