Electrochemical micromachining of micro-dimple arrays using a polydimethylsiloxane (PDMS) mask
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- 作者：Xiaolei Chena ; Ningsong Qua ; b ; nsqu@nuaa.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Hansong Lia ; Zhengyang Xua
- 关键词：Electrochemical micromachining ; Micro-dimple array ; PDMS mask ; Through-mask electrochemical micromachining
- 刊名：Journal of Materials Processing Technology
- 出版年：2016
- 出版时间：March 2016
- 年：2016
- 卷：229
- 期：Complete
- 页码：102-110
- 全文大小：3656 K
文摘
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It is difficult to generate micro-dimple arrays with PDMS mask in hydrostatic mode.
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Micro-dimple arrays with poor uniformity were obtained in lateral flow mode.
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The forward flow mode was modified with multi-slits structure cathode.
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With the modified mode, micro-dimple arrays could be generated uniformly.