Thermally driven micro-electrostatic fieldmeter

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• 作者：Xianxiang Chen ; Chunrong Peng ; Hu Tao ; Chao Ye ; Qiang Bai ; Shaofeng Chen ; Shanhong Xia
• 关键词：MEMS ; Micro-electrostatic fieldmeter ; Thermal actuator ; Correlation detection
• 刊名：Sensors and Actuators A: Physical
• 出版年：2006
• 出版时间：20 November 2006
• 年：2006
• 卷：132
• 期：2
• 页码：677-682
• 全文大小：489 K

文摘

A thermally driven micro-electrostatic fieldmeter is reported, which mainly consists of sense electrodes, grounded shuttle electrodes, bent beam thermal driver, etc. The bent beam thermal driver is driven with a square wave of amplitude as low as ±2 V amplitude and of frequency as high as 20 kHz. The electric field intensity resolution of the electrostatic fieldmeter can reach 240.8 V/m.