1D ZnO nano-assemblies by Plasma-CVD as chemical sensors for flammable and toxic gases

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• 作者：Davide Barreca ; Daniela Bekermann ; Elisabetta Comini ; Anjana Devi ; Rol ; A. Fischer ; Alberto Gasparotto ; Chiara Maccato ; Giorgio Sberveglieri ; Eugenio Tondello
• 关键词：ZnO ; 1D nano-assemblies ; Plasma enhanced-chemical vapor deposition ; Gas sensors
• 刊名：Sensors and Actuators B: Chemical
• 出版年：2010
• 出版时间：6 August 2010
• 年：2010
• 卷：149
• 期：1
• 页码：1-7
• 全文大小：397 K

文摘

In this work, 1D ZnO nano-assemblies were prepared on Al₂O₃ substrates by plasma enhanced-chemical vapor deposition (PE-CVD), and characterized in their morphology and chemical composition by field emission-scanning electron microscopy (FE-SEM), energy dispersive X-ray spectroscopy (EDXS) and X-ray photoelectron spectroscopy (XPS). For the first time, the sensing performances of PE-CVD ZnO nanosystems were tested in the detection of toxic/combustible gases (CO, H₂ and CH₄), revealing very good responses already at moderate working temperatures. In particular, carbon monoxide and hydrogen detection was possible already at 100 °C, whereas methane sensing required a minimum temperature of 200 °C. The performances of the present ZnO nanosystems, that make them attractive candidates for technological applications, are presented and discussed in terms of their unique and controllable morphological organization.