Design and experimental validation of an ultra-precision Abbe-compliant linear encoder-based position measurement system
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- 作者：Niels Bosmans1 ; niels.bosmans@kuleuven.be" class="auth_mail" title="E-mail the corresponding author ; Jun Qian ; Dominiek Reynaerts
- 关键词：Abbe principle ; Linear encoder ; Ultra-precision ; Metrology ; Thermal error ; Uncertainty ; Mechatronic ; Machine tool ; Coordinate measuring machine (CMM)
- 刊名：Precision Engineering
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：47
- 期：Complete
- 页码：197-211
- 全文大小：4126 K
文摘
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The development of an Abbe-compliant linear encoder-based measurement system is presented.
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The system consists of a linear motor-driven linear scale and a capacitive sensor mounted in line.
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A thermal center between linear scale and capacitive sensor ensures thermal stability.
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An experimental setup has been built to check reproducibility and repeatability.
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The measurement uncertainty of the one-DOF prototype is below 29 nm (k = 2).