The effect of surface roughness on the vibration behavior of AFM piezoelectric MC in the vicinity of sample surface in air environment based on MCS theory
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- 作者：A.H. Korayem ; M.H. Korayem ; hkorayem@gmail.com" class="auth_mail" title="E-mail the corresponding author
- 关键词：AFM ; Amplitude mode ; Sample surface topography ; Surface roughness ; Piezoelectricmicro cantilever
- 刊名：Precision Engineering
- 出版年：2017
- 出版时间：January 2017
- 年：2017
- 卷：47
- 期：Complete
- 页码：212-222
- 全文大小：4927 K
文摘
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The effect of surface roughness has been investigated in Micro and Nano scales according to the types of the surface roughness.
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The micro cantilever (MC) modeling has been schemed based on the Multiple Couple Stress (MCS) Theory
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The effect of roughness radius on the minimum and maximum amplitude of Piezoelectric MC has been studied based on the geometry of roughness in air environment.
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The effect of environmental forces including van der Waals, Capillary and Contact Forces on the vibration amplitude of MC forms the basis of surface topography.