Piezoresistivity of n-type conductive ultrananocrystalline diamond

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• 作者：N. Wiora ; ^{neda.wiora@uni-ulm.de} ; M. Mertens ; M. Mohr ; K. Brü ; hne ; H.-J. Fecht
• 关键词：Ultrananocrystalline diamond ; n-Type conductivity ; Piezoresistivity ; HFCVD
• 刊名：Diamond and Related Materials
• 出版年：2016
• 出版时间：November 2016
• 年：2016
• 卷：70
• 期：Complete
• 页码：145-150
• 全文大小：789 K
• 卷排序：70

文摘

Piezoresistive characteristics of n-type conductive ultrananocrystalline diamond have been investigated. Highest gauge factor (k = 9.5) was found at RT for longitudinal arrangement and a sheet resistance of about 30 kΩ/square. Gauge factor increases with sheet resistance of the piezoresistor and decreases with temperature.