A combined ElectroWetting On Dielectrics superhydrophobic platform based on silicon micro-structured pillars
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- 作者：Angelo Accardo ; Francesco Gentile ; Maria Laura Coluccio ; Federico Mecarini ; Francesco De Angelis ; Enzo Di Fabrizio
- 关键词：Superhydrophobicity ; EWOD ; Silicon ; Micropillars ; Micromanipulator
- 刊名：Microelectronic Engineering
- 出版年：2012
- 出版时间：October, 2012
- 年：2012
- 卷：98
- 期：Complete
- 页码：651-654
- 全文大小：426 K
文摘
A simple and ready to use approach for combining silicon superhydrophobic surfaces with ElectroWetting On Dielectrics (EWOD) phenomenon is presented. The substrate is fabricated using a two-phases process, where a first optical lithography step is used to define the position of the micro-pillars and a second one exploits the characteristics of reactive ion etch Bosch technique. The fabricated substrate has been then coupled with a micro-manipulator tip to show the local changes mechanism of contact angle by applying very low DC voltages in the range from 5 to 30 V. The device can be of interest for a wide variety of microfluidics applications related to the biomedical field.