Microstructure and mechanical property of TiSiN nanocomposite film with inserted CrAlN nanomultilayers
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- 作者：Wei Lia ; b ; liwei176@usst.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Ping Liua ; Jia Mengb ; Ke Zhanga ; Fengcang Maa ; Xinkuan Liua ; Xiaohong Chena ; Daihua Hea
- 关键词：TiSiN nanocomposite film ; Nanomultilayers ; Superhardness effect ; Microstructure ; Magnetron sputtering
- 刊名：Surface and Coatings Technology
- 出版年：2016
- 出版时间：25 January 2016
- 年：2016
- 卷：286
- 期：Complete
- 页码：313-318
- 全文大小：1232 K
文摘
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TiSiN films inserted with CrAlN nanolayers of different thicknesses were synthesized.
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The nanocomposite structure of TiSiN was damaged with the insertion of CrAlN nanolayers.
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The film can be hardened after initial softening with the increase of CrAlN thickness.