Fabrication and characterization of HfC/SiC nanomultilayered films with enhanced mechanical properties
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- 作者：Wei Lia ; b ; liwei176@usst.edu.cn" class="auth_mail" title="E-mail the corresponding author ; Jia Mengb ; Ping Liua ; Haoming Dua ; Ke Zhanga ; Fengcang Maa ; Xinkuan Liua ; Xiaohong Chena
- 关键词：HfC/SiC nanomultilayered film ; Microstructure ; Epitaxial growth ; Mechanical property ; Strengthening mechanism
- 刊名：Vacuum
- 出版年：2016
- 出版时间：June 2016
- 年：2016
- 卷：128
- 期：Complete
- 页码：230-233
- 全文大小：1391 K
文摘
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The HfC/SiC nanomultilayered films were prepared by reactive magnetron sputtering.
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Effects of SiC layer thickness on structure and mechanical properties were studied.
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The amorphous SiC layers could be crystallized and grow epitaxially with HfC layers.
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The maximum hardness and elastic modulus reached 36.2 and 419 GPa, respectively.