Vacuum-ultraviolet ellipsometry spectra and optical properties of Ba(Zr,Ti)O₃ films

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• 作者：G. Suchaneck^a ; ^{Gunnar.Suchaneck@tu-dresden.de} ; E. Chernova^b ; ^c ; A. Kleiner^a ; R. Liebschner^a ; ^d ; L. Jastrabí ; k^b ; D.C. Meyer^d ; A. Dejneka^b ; G. Gerlach^a
• 关键词：Barium zirconate titanate thin film ; Film structure ; VUV ellipsometry ; Optical properties
• 刊名：Thin Solid Films
• 出版年：2017
• 出版时间：1 January 2017
• 年：2017
• 卷：621
• 期：Complete
• 页码：58-62
• 全文大小：612 K
• 卷排序：621

文摘

The dielectric functions of in-situ crystallize BZT thin films fabricated on Pt(111)-coated Si wafers by multi-target reactive sputtering (MTRS) were obtained by means of spectroscopic ellipsometry in the spectral range from 0.8 to 8.7 eV. Investigation of the optical data of BaZr0.2Ti0.8O3 above 4 eV was performed for the first time and the interband transition energy of the O 2p to Zr 4d transition was derived to be ~7.7 eV.