The effect of aging time on intermetallic thin films has been investigated. Larger precipitated particles cause more incoherence in the Ni-rich matrix. Hardness and young's modulus increase with increase in the density of precipitates. The high thermodynamic reactivity of Ti forms TiO2 layer onto the film surface. TiO2 cause Ni-rich matrix trapped behind the film surface along with TiC precipitates.