Multi-pulse laser damage can be analyzed plotting damaging shot number vs. fluence.
A fatigue effect was only observed for small laser beams, avoiding worse precursors.
The fatigue behavior of a mixture cannot be interpolated from the pure oxides.
SiO2 and Al2O3 damage at 266 nm is due to deterministic material modifications.
Hafnia multi-pulse laser damage with small beams is stochastic even at 266 nm.