Nanosecond multi-pulse laser-induced damage mechanisms in pure and mixed oxide thin films
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文摘

Multi-pulse laser damage can be analyzed plotting damaging shot number vs. fluence.

A fatigue effect was only observed for small laser beams, avoiding worse precursors.

The fatigue behavior of a mixture cannot be interpolated from the pure oxides.

SiO2 and Al2O3 damage at 266 nm is due to deterministic material modifications.

Hafnia multi-pulse laser damage with small beams is stochastic even at 266 nm.

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