We fabricate isolated and symmetric Ca-silicide units on Si(1 1 4)-2 × 1.
At 0.4 ML, a (1 1 3) facet is developed through substrate etching by F.
A 2×2 CaF overlayer is formed uniformly only on the (1 1 3) facet.
The 2×2 CaF overlayer has no net dipole moment.