Planar-assembly triaxial microaccelerometer with electromechanical sigma-delta ADCs

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• 作者：Wuestling ; S. ; Fromhein ; O. ; Gemmeke ; H. ; Tschuch ; M. ; Wollersheim ; O.
• 关键词：Electromechanics ; Microaccelerometers ; Sigma-delta analog-digital converters
• 刊名：Sensors and Actuators A: Physical
• 出版年：1997
• 出版时间：June, 1997
• 年：1997
• 卷：61
• 期：1-3
• 页码：436-440
• 全文大小：582 K

文摘

By combination of two LIGA-fabricated micromechanical acceleration sensors with a Z-axis sensitive acceleration sensor element, a planar assembly of a triaxial microaccelerometer can be put into practice. In our readout system, each channel consists of a dedicated full-custom ASIC electromechanical sigma-delta modulator and a digital sinc³(f) decimation filter. The output data interface is intended for readout by microcontrollers and digital signal processors (DSPs). Software-programmable reference voltages facilitate self-test and software-controlled range and offset adjustment. Temperature compensation can be performed by reading the output of a temperature-sensing circuit on the sensor head. The measured noise level is 5 μg Hz⁻ at a measuring range of ±1.5g. Simulations with a dedicated high-level simulator have shown that the sensitivity can be increased by at least one order of magnitude by optimizing the sigma-delta modulators. As an example for application, an acceleration data logger will be described. Finally, we present the design of an improved accelerometer chipset which consists of a single sensor head chip and an enhanced decimation filter interface.