Synthesis of amorphous hydrogenated carbon thin films by magnetized radio-frequency discharge in argon-acetylene mixture at very low gas pressure
详细信息 查看全文
- 作者：Ahmad Hamdan ; ahmad.ba.hamdan@gmail.com" class="auth_mail" title="E-mail the corresponding author ; Georges Al Makdessi ; Joë ; lle Margot
- 关键词：Plasma induced polymerization ; Radiofrequency discharge ; Dusts ; Acetylene ; Amorphous carbon ; Magnetic field
- 刊名：Thin Solid Films
- 出版年：2016
- 出版时间：29 January 2016
- 年：2016
- 卷：599
- 期：Complete
- 页码：84-97
- 全文大小：2790 K
文摘
- •
Deposition of amorphous hydrogenated carbon by magnetized RF-discharge
- •
Modifying the film morphology by changing the pressure and the C2H2 percentage
- •
Studying the effect of the magnetic field on the film structure