Numerical examination of the effect of steady crucible rotation in the liquid phase diffusion growth of SiGe
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- 作者：M. Sekhon ; mssekhon@uvic.ca" class="auth_mail" title="E-mail the corresponding author ; S. Dost
- 关键词：A2. Liquid phase diffusion ; A1. Computer simulation ; B1. Germanium silicon alloys ; A2. Steady crucible rotation
- 刊名：Journal of Crystal Growth
- 出版年：2015
- 出版时间：15 November 2015
- 年：2015
- 卷：430
- 期：Complete
- 页码：63-70
- 全文大小：1825 K
文摘
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Liquid phase diffusion growth of SiGe crystals was numerically simulated.
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The effect of steady crucible rotation was studied.
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Steady crucible rotation is effective in suppressing natural convection.
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Marginal interface flattening effect is predicted.
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Radial composition uniformity is found to improve after early growth hours.