In situ GISAXS study of a Si-containing block copolymer under solvent vapor annealing: Effects of molecular weight and solvent vapor composition
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文摘

The self-assembly of 12–16 kg/mol molecular weight Si-containing block copolymer (BCP) thin films was characterized in situ.

The changes in lattice dimensions and orientation of the self-assembled features was tracked during solvent annealing.

A non-bulk morphology was produced by changing the mixing ratios of the two selective solvents.

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