A study of monolithic CMOS pixel sensors back-thinning and their application for a pixel beam telescope

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• 作者：Marco Battaglia ; Devis Contarato ; Piero Giubilato ; Leo Greiner ; Lindsay Glesener ; Benjamin Hooberman
• 关键词：ILC ; Monolithic pixel sensors
• 刊名：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
• 出版年：2007
• 出版时间：1 September 2007
• 年：2007
• 卷：579
• 期：2
• 页码：675-679
• 全文大小：150 K

文摘

This paper reports results of a detailed study of charge collection and signal-to-noise performance of CMOS monolithic pixel sensors before and after back-thinning to 50 and . This study shows that neither their noise nor their response to ionising particles has been degraded by the thinning process. The thinned chips have been used to build a pixel beam telescope for the ALS 1.5 GeV e^- beam test facility. After alignment, an extrapolation resolution better than has been measured for a configuration of four equally spaced pixel detector planes.