Monolithic pixel sensors in deep-submicron SOI technology with analog and digital pixels

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作者：Marco Battaglia ; Dario Bisello ; Devis Contarato ; Peter Denes ; Piero Giubilato ; Lindsay Glesener ; Serena Mattiazzo ; Chinh Vu
关键词：Monolithic pixel sensor ; SOI ; CMOS technology ; Particle detection
刊名：Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
出版年：2009
出版时间：1 June 2009
年：2009
卷：604
期：1-2
页码：380-384
全文大小：404 K

文摘

This paper presents the design and test results of a prototype monolithic pixel sensor manufactured in deep-submicron fully depleted Silicon-On-Insulator (SOI) CMOS technology. In the SOI technology, a thin layer of integrated electronics is insulated from a (high-resistivity) silicon substrate by a buried oxide. Vias etched through the oxide allow to contact the substrate from the electronics layer, so that pixel implants can be created and a reverse bias can be applied. The prototype chip, manufactured in OKI SOI process, features both analog and digital pixels on a pitch. Results of tests performed with an infrared laser and 1.35 GeV electrons and a first assessment of the effect of ionising and non-ionising doses are discussed.

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