Highly efficient vertical fiber interfacing grating coupler with bilayer anti-reflection cladding and backside metal mirror

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• 作者：Zanyun Zhang^a ; ^b ; Beiju Huang^b ; ^{bjhuang@semi.ac.cn} ; Zan Zhang^b ; Chuantong Cheng^b ; Hongwei Liu^a ; Hongqiang Li^a ; Hongda Chen^b
• 关键词：Silicon-on-insulator (SOI) technology ; Grating coupler ; Vertical fiber ; Anti-reflection cladding ; Backside metal mirror
• 刊名：Optics & Laser Technology
• 出版年：2017
• 出版时间：1 May 2017
• 年：2017
• 卷：90
• 期：Complete
• 页码：136-143
• 全文大小：1087 K
• 卷排序：90

文摘

Vertical grating coupler with 88.3% coupling efficiency and 1-dB bandwidth of 61 nm. Si3N4/SiO2 anti-reflection cladding and backside metal mirror are both utilized. Bidirectional grating plays double roles of vertical coupling and power splitting. This grating has strong fiber misalignment tolerance at resonance wavelength.